PROJECTION ALIGNER, AND PROJECTION EXPOSURE METHOD

PURPOSE:To provide a projection aligner which can draw an accurate picture with simple structure and can manufacture a semiconductor element with high accuracy, and a projection exposure method. CONSTITUTION:A projection aligner which projects and exposes the image of a photomask 4 on the semiconduc...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KURIMOTO KOZO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!