ORGANIC MATTER REMOVING APPARATUS

PURPOSE: To provide an organic matter removing apparatus capable of removing a very small amount of organic matters stuck to the surface of test samples of silicon crystal or gallium arsenide crystal. CONSTITUTION: A sealed container 1 to prevent the ingress of atmospheric air, one or more chemical containers 7 installed in the sealed container 1, means 9 for heating the chemical container 7, and a sample container 5 holding a sample 3 are provided, a chemical solution evaporated from the chemical container 7 is aggregated on the surface of the sample 3, and organic matters stuck to the surface of the sample 3 are removed in this apparatus. As a chemical solution, at least one kind of organic solvent selected from a group of acetone, methyl isobutylketone, methylethylketone, methanol, ethanol, butanol, diethylether and tetorohydrofuran, and at least one kind of alkali solution selected from a group of sodium hydroxide, potassium hydroxide, ammonia and quaternary ammonia salt are used.