FLOW RATE CONTROL METHOD

PURPOSE: To provide a flow rate control method with which control into a prescribed flow rate can be speedily performed without generating overshoot. CONSTITUTION: Concerning the flow rate control method with which the flow rate of fluid is controlled by controlling a flow rate control valve 10 inte...

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1. Verfasser: KAZAMA YOICHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE: To provide a flow rate control method with which control into a prescribed flow rate can be speedily performed without generating overshoot. CONSTITUTION: Concerning the flow rate control method with which the flow rate of fluid is controlled by controlling a flow rate control valve 10 interposed at a fluid passage 4 for letting the fluid flow corresponding to a valve driving signal from a flow rate control part 22, this method is provided with a process for tabulating and storing the valve driving signals corresponding to plural flow rate set value as learning values in advance, process for finding and storing relearning values corresponding to the plural flow rate set values based on the real valve driving signal and the learning value of the table corresponding to the prescribed set value while letting the fluid flow to the flow rate control valve 10 after the flow rate control valve 10 is really assembled with a using system, and process for finding and outputting the valve driving signal based on the relearning value. Thus, the valve driving signal based on the relearning value suited to real use conditions can be outputted and speedy flow rate control is enabled without overshoot.