TUNING-FORK TYPE GYROSCOPE
PROBLEM TO BE SOLVED: To measure the angular speed effectively by disposing torque electrodes for balancing the force at the upper and lower parts of a vibration structure in order to control the displacement thereof in the direction of Z-axis thereby controlling distortion of the vibration structur...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To measure the angular speed effectively by disposing torque electrodes for balancing the force at the upper and lower parts of a vibration structure in order to control the displacement thereof in the direction of Z-axis thereby controlling distortion of the vibration structure accurately. SOLUTION: A vibration structural section 30 is vibrated in Y-direction by means of motors 31a, 31b and turns about X-axis to generate Coriolis force. Distortion of the structure 30 causes variation in the capacitance of sensor electrodes 33a, 33b disposed symmetrically at the lower part thereof and the angular speed in the direction of X-axis is determined based on the variation of capacitance. Lower torque electrodes 35a, 35b are disposed vertically in the direction of X-axis with respect to the electrodes 33a, 33b so that the distortion of the structure 30 can be controlled. Upper torque electrodes 37a, 37b are disposed to be superposed partially on the electrodes 35a, 35b and the structure 30 is held between the electrodes 37a, 37b and 35a, 35b. Consequently, an electrostatic force for balancing the force in Z-direction can be applied easily without having any effect on the vibratory motion of tuning fork mode in Y-direction. |
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