CHEMICALS CONVEYING PIPING

CHEMICALS CONVEYING PIPING

PURPOSE: To early detect the detects of an inner wall, in which lowering the strength is caused, without requiring any periodic inspections in chemicals conveying piping for conveying organic alkali-release liquid for separating a resist from semiconductor substrates. CONSTITUTION: The degradation o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: WATABE TOSHIYUKI
Format: Patent
Sprache:eng
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
PIPE-LINE SYSTEMS
PIPE-LINES
STORING OF DISTRIBUTING GASES OR LIQUIDS
WEAPONS
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Beschreibung
Zusammenfassung:PURPOSE: To early detect the detects of an inner wall, in which lowering the strength is caused, without requiring any periodic inspections in chemicals conveying piping for conveying organic alkali-release liquid for separating a resist from semiconductor substrates. CONSTITUTION: The degradation of the strength of a pipe body can be early detected by burying plural bar-like electrically conductive bars 1 for detecting the separation of pipe wall due to linkage of liquid puddles 6 by reduction in insulation resistance into the pipe body 2.