CORROSION-RESISTANT ELECTROSTATIC CHUCK PROVIDED WITH IMPROVED COOLING SYSTEM

PROBLEM TO BE SOLVED: To obtain an electrostatic chuck which has an improved cooling capability with respect to a substrate, a large electrostatic clamp force, and improved corrosion resistance. SOLUTION: An electrostatic chuck 20 holding a substrate 40 in a process chamber 50 is equipped with a bas...

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Bibliographische Detailangaben
Hauptverfasser:	JIYOSEFU EFU SARUFUERUDAA, JIYON EFU KIYAMERON, CHIYANDORA DESUPANDEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To obtain an electrostatic chuck which has an improved cooling capability with respect to a substrate, a large electrostatic clamp force, and improved corrosion resistance. SOLUTION: An electrostatic chuck 20 holding a substrate 40 in a process chamber 50 is equipped with a base 25, which retains insulator 30 having restoring property. The insulator 30 is provided with an electrode 34 embedded in the inside, a top surface 34 having an outer peripheral edge 32, and a cooling group 45 holding coolant in the top surface 34. The width of an edge gap is small such that the coolant in the group 45 cools sufficiently the outer edge 120 of the substrate 40 held on the shuck 20. The insulator 30 is elastically fitted to the substrate 40, in order to prevent the coolant from practically leaking from the tip of the cooling group 45.