APPARATUS FOR PRODUCING OPTICAL DISK

PURPOSE: To produce a metallic master disk which is excellent in yield and reliability by realizing the reduction of a treatment cost and the improvement in installation environment, equipment area and cycle time in a process for producing the master disk. CONSTITUTION: A polishing and washing mecha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMAGUCHI YOSHIHIRO, MITSUI MICHIO, NAITO HIROSHI, TAKANO JUNZO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE: To produce a metallic master disk which is excellent in yield and reliability by realizing the reduction of a treatment cost and the improvement in installation environment, equipment area and cycle time in a process for producing the master disk. CONSTITUTION: A polishing and washing mechanism is composed by providing this mechanism with an original plate installing means 31 and disposing a polishing means 32 as well as first washing means 33 and second washing means 34 around (near) the original plate installing means 31. A polishing treatment and a washing treatment are executed in one process.