INSPECTION EQUIPMENT FOR COLOR FILTER SUBSTRATE

PURPOSE: To inspect a color filter substrate automatically and quantitatively while shortening the inspection time. CONSTITUTION: A first illuminator 3, a first image pickup unit 5 and a first image processing section 8 determine the area and position of white part and defective part caused by a foreign matter on a color filter substrate 1 using a regular reflection light from the filter substrate 1. A second illuminator 4, a second image pickup unit 6 and a second image processing section 9 determine whether a foreign matter on the color filter substrate 1 is an adhering matter for diffusing the light or a fixed matter scarcely reflecting the light. Based on the results of image processing, a main control section 10 detects a detrimental white part, i.e., a white defect, and a detrimental fixed foreign matter, i.e., a foreign matter defect. A decision is made that the color filter substrate 1 is acceptable, rejectable or requiring correction based on the number of defects.