POLISHING DEVICE

PURPOSE: To provide a polishing device which can be carried in a clean room or the like easily with a compact structure. CONSTITUTION: This polishing device, which feeds polishing fluid to a turn table 1 with cloth affixed onto its top surface and polishes the contact surface of an object to be proc...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NISHI TOYOMI, TOGAWA TETSUJI
Format: Patent
Sprache:eng
Schlagworte:
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