POLISHING DEVICE

PURPOSE: To provide a polishing device which can be carried in a clean room or the like easily with a compact structure. CONSTITUTION: This polishing device, which feeds polishing fluid to a turn table 1 with cloth affixed onto its top surface and polishes the contact surface of an object to be proc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NISHI TOYOMI, TOGAWA TETSUJI
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: To provide a polishing device which can be carried in a clean room or the like easily with a compact structure. CONSTITUTION: This polishing device, which feeds polishing fluid to a turn table 1 with cloth affixed onto its top surface and polishes the contact surface of an object to be processed by pressing the object to be processed against a cross top surface with a top ring 2, is provided with a rotating shaft 5 which transmits the rotational force of the top ring 2 to the inside of a hollow part by disposing a motor 6A for driving the rotation of the top ring 2 lower than the turn table 1 and making an operation shaft 4 for moving the top ring 2 hollow.