ELECTROSTATIC ACTUATOR

ELECTROSTATIC ACTUATOR

PURPOSE:To provide a practical compact actuator where the gap between electrodes is made accurately and friction is reduced due to recess and projection effect created on a lubrication layer and a substrate. CONSTITUTION:At least either a first substrate 1 and a second substrate 2 or the second subs...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAGI TAKAYUKI, TAKAGI HIROTSUGU
Format: Patent
Sprache:eng
Schlagworte:
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To provide a practical compact actuator where the gap between electrodes is made accurately and friction is reduced due to recess and projection effect created on a lubrication layer and a substrate. CONSTITUTION:At least either a first substrate 1 and a second substrate 2 or the second substrate 2 and a third substrate 3 out of the first substrate 1 where a plurality of electrodes are laid out and the third substrate 3 where the second substrate 2 for isolating and forming a movable element 7 and a window are formed are joined via an organic film.