FORMATION OF TRANSPARNT CONDUCTIVE FILM

PURPOSE: To form an SnO2 film uniform in thickness while preventing the infiltration of SnO2 into the rear of a glass substrate and to obviate the deposition of the contaminant of a belt on the substrate and the damage of the substrate. CONSTITUTION: A glass substrate 3 is placed on a conveyor belt...

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Bibliographische Detailangaben
Hauptverfasser:	NISHIWAKI HIDENORI, MATSUMI SHIN, HAKU HISAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: To form an SnO2 film uniform in thickness while preventing the infiltration of SnO2 into the rear of a glass substrate and to obviate the deposition of the contaminant of a belt on the substrate and the damage of the substrate. CONSTITUTION: A glass substrate 3 is placed on a conveyor belt 1 and conveyed, and an SnO2 film as a transparent conductive film is formed on the substrate 3 by thermal CVD. A heat-resistant sheet 2 having a larger area than the substrate and consisting of a fire insulating fiber for high temp. is inserted between the belt 1 and substrate 3 to improve the yield.