WAFER LIFTING EQUIPMENT

WAFER LIFTING EQUIPMENT

PURPOSE:To provide a simple-structured equipment for taking wafers in a cassette out of the cassette without damaging them. CONSTITUTION:Vacuum pin sets 3A-3F in the same number as that of wafers 2 stored in a cassette 1 are inserted between the waters and solenoid valves 8A-8F are operated sequenti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: KURIMOTO KOZO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE:To provide a simple-structured equipment for taking wafers in a cassette out of the cassette without damaging them. CONSTITUTION:Vacuum pin sets 3A-3F in the same number as that of wafers 2 stored in a cassette 1 are inserted between the waters and solenoid valves 8A-8F are operated sequentially. Each time the solenoid valve is operated, it is detected by a vacuum pressure sensor whether there is a wafer or not. Then, the wafer is sucked by the vacuum pincette and then is lifted by an actuator 11. When the wafer is lifted, only a rear face of the wafer is brought into contact with a lifting member. Therefore, no damage is given to the wafer.