ROTARY COATING DEVICE

PURPOSE: To provide a rotary coating mechanism wherein a spin rotation mechanism of high accuracy for effecting accurate coating and a mechanism for introducing into rotary parts fluid of various kinds such as washing liquid for vacuum for sucking a base board or for washing rear side of base board...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KOTOYORI MASAHIKO
Format: Patent
Sprache:eng
Schlagworte:
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