ROTARY COATING DEVICE

PURPOSE: To provide a rotary coating mechanism wherein a spin rotation mechanism of high accuracy for effecting accurate coating and a mechanism for introducing into rotary parts fluid of various kinds such as washing liquid for vacuum for sucking a base board or for washing rear side of base board...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	KOTOYORI MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: To provide a rotary coating mechanism wherein a spin rotation mechanism of high accuracy for effecting accurate coating and a mechanism for introducing into rotary parts fluid of various kinds such as washing liquid for vacuum for sucking a base board or for washing rear side of base board can be provided at the same time. CONSTITUTION: A spin shaft of a rotary coating device comprises a spin main shaft portion 23 for rotating a base board receiving base 2 for receiving a base board 1 to be coated and a fluid introducing shaft portion 31 including at least one of a suction passage 18 for sucking the board 1 and a fluid passage 16 for passing washing liquid for washing rear side of the board 1, and the portion 23 is connected to the portion 31 through a shaft joint 30. And at the same time, the portion 23 is connected to a spin drive device 7, and a pipe in communication with the suction passage 18 and fluid passage 16 is connected to the portion 31 through one or more fluid seal units 32.