PROBE MICROSCOPE AND MEASUREMENT METHOD BY THE MICROSCOPE

PURPOSE: To provide a probe microscope which can correctly measure any stepped part on a sample. CONSTITUTION: A scanning mechanism 11 for performing y-axis scan and z-axis displacement is fixed to a flange 10 which performs a long stroke in an x-axis direction. Two piezoelectric elements 12A, 12B a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGASAWA KIYOSHI, NONAKA TOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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