PROBE MICROSCOPE AND MEASUREMENT METHOD BY THE MICROSCOPE

PURPOSE: To provide a probe microscope which can correctly measure any stepped part on a sample. CONSTITUTION: A scanning mechanism 11 for performing y-axis scan and z-axis displacement is fixed to a flange 10 which performs a long stroke in an x-axis direction. Two piezoelectric elements 12A, 12B a...

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Bibliographische Detailangaben
Hauptverfasser:	NAGASAWA KIYOSHI, NONAKA TOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: To provide a probe microscope which can correctly measure any stepped part on a sample. CONSTITUTION: A scanning mechanism 11 for performing y-axis scan and z-axis displacement is fixed to a flange 10 which performs a long stroke in an x-axis direction. Two piezoelectric elements 12A, 12B are fixed at an end of the scanning mechanism 11 along a particular scanning direction. Cantilevers 13A, 13B are respectively fixed to the piezoelectric elements, probes 14A, 14B are fixed to an free end of the cantilevers, and protrusions 15A, 15B are formed at the tip of the respective probes 14A, 14B. At the time of measurement, a piezoelectric element whose protrusion protrude in a direction where scanning advances is stretched for measurement, reciprocal scanning is done along the same scanning line, and measurement results on stepped parts are combined.