COMPOSITION CONTAINING CYCLIC ACETAL OR CYCLIC KETAL OF BETA-KETO ESTER OR BETA-AMIDE
PROBLEM TO BE SOLVED: To provide a compsn. with which the formation of photosensitive layers of a wide range of thicknesses is possible and is adequately usable as a positive type photoresist for printing plates, printed circuits, integrated circuits, non-silver photographic films, etc. SOLUTION: Th...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a compsn. with which the formation of photosensitive layers of a wide range of thicknesses is possible and is adequately usable as a positive type photoresist for printing plates, printed circuits, integrated circuits, non-silver photographic films, etc. SOLUTION: This compsn. consists of (a) the compd. of the formula and (b) compds. (halogen compds., positive ion photoinitiators, etc.) which liberate an acid by exposure to chemical rays. The compsn. contains (a), (b) and (c) a binder (novolak, etc.). (an example of groups, R =methyl, phenyl, R to R =H, X=-O-, -NH-, m=2, 3, n=0, 1, Q = an aliphat. group, alicyclic group, arom. aliphat. group of (m) value). |
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