METHOD AND APPARATUS FOR CALIBRATING SURFACE DEFECT-INSPECTION OPTICAL SYSTEM

METHOD AND APPARATUS FOR CALIBRATING SURFACE DEFECT-INSPECTION OPTICAL SYSTEM

PURPOSE: To improve the calibration reliability and easily finely adjust a detection position to a slit light, by reducing a count of steps of a calibration work by a worker and eliminate irregularities when a relative position of an optical system is evaluated. CONSTITUTION: According to the method...

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Hauptverfasser: KOBAYASHI MASANORI, HIRONO AYUMI
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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creator KOBAYASHI MASANORI
HIRONO AYUMI
description PURPOSE: To improve the calibration reliability and easily finely adjust a detection position to a slit light, by reducing a count of steps of a calibration work by a worker and eliminate irregularities when a relative position of an optical system is evaluated. CONSTITUTION: According to the method and apparatus for calibrating a surface defect-inspection optical system, partial roughness circular marks 36A, 36B are formed at a master roll 16, and the reflecting amount of light at the parts is measured, whereby a detection position of a line sensor to a slit light is adjusted. The master roll 16 having a plurality of reference marks 32-36A, 36B formed on the surface thereof is arranged at an inspection stage of the surface defect inspection optical system. A characteristic amount representing a relative positional relationship of the optical system is calculated from each read image of the reference marks 32-36A, 36B of the master roll.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
title METHOD AND APPARATUS FOR CALIBRATING SURFACE DEFECT-INSPECTION OPTICAL SYSTEM
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