METHOD AND APPARATUS FOR CALIBRATING SURFACE DEFECT-INSPECTION OPTICAL SYSTEM

PURPOSE: To improve the calibration reliability and easily finely adjust a detection position to a slit light, by reducing a count of steps of a calibration work by a worker and eliminate irregularities when a relative position of an optical system is evaluated. CONSTITUTION: According to the method...

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Hauptverfasser:	KOBAYASHI MASANORI, HIRONO AYUMI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PURPOSE: To improve the calibration reliability and easily finely adjust a detection position to a slit light, by reducing a count of steps of a calibration work by a worker and eliminate irregularities when a relative position of an optical system is evaluated. CONSTITUTION: According to the method and apparatus for calibrating a surface defect-inspection optical system, partial roughness circular marks 36A, 36B are formed at a master roll 16, and the reflecting amount of light at the parts is measured, whereby a detection position of a line sensor to a slit light is adjusted. The master roll 16 having a plurality of reference marks 32-36A, 36B formed on the surface thereof is arranged at an inspection stage of the surface defect inspection optical system. A characteristic amount representing a relative positional relationship of the optical system is calculated from each read image of the reference marks 32-36A, 36B of the master roll.