MEASURING DEVICE FOR SURFACE SHAPE

PURPOSE:To provide a surface-shape measuring device capable of quantitatively measuring the state of the surface of a specimen with high accuracy by a simple operation. CONSTITUTION:A specimen 1 is placed on a sample base 3, light is projected onto the specimen 1 by an optical system 8, the sample b...

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Bibliographische Detailangaben
1. Verfasser:	YANAGISAWA MUNEHISA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a surface-shape measuring device capable of quantitatively measuring the state of the surface of a specimen with high accuracy by a simple operation. CONSTITUTION:A specimen 1 is placed on a sample base 3, light is projected onto the specimen 1 by an optical system 8, the sample base 3 is inclined while using a specified surface as a reference at every unit angle by a motor 6, and reflected light from the specimen 1 is received by a CCD 16. The surface shape of the specimen 1 is arithmetically operated and analyzed on the basis of the light-receiving data of the CCD 16 obtained at every unit angle by an arithmetic analyzing circuit 21 by the command of a CPU 17.