SYNTHETIC DIAMOND AND SYNTHESIS OF THE SAME

PURPOSE: To reduce the warpage of diamond obtd. by a vapor phase synthesis method and to enhance yield and to reduce cost without causing trouble to a subsequent working process such as polishing and a device process. CONSTITUTION: The peripheral part 1 of the surface of a substrate 5 is not scratch...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OJI MASATAKA, FUJIMORI NAOHARU
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE: To reduce the warpage of diamond obtd. by a vapor phase synthesis method and to enhance yield and to reduce cost without causing trouble to a subsequent working process such as polishing and a device process. CONSTITUTION: The peripheral part 1 of the surface of a substrate 5 is not scratched but the remaining part 2 of the surface is scratched and diamond is synthesized using the resultant substrate 5. In other way, the peripheral part of the surface of a substrate is coated with a heat resistant material and diamond is synthesized using the resultant substrate.