DEFECT INSPECTING METHOD FOR X-RAY TAKING-OUT WINDOW

DEFECT INSPECTING METHOD FOR X-RAY TAKING-OUT WINDOW

PURPOSE: To precisely detect the fine defect of an X-ray taking-out window. CONSTITUTION: When a fine defect 3 is present on the X-ray taking-out window of an X-ray generating chamber 1, an X-ray is emitted to the X-ray taking-out window and an X-ray transmitting structure 4 having a standard patter...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SEKIMOTO MISAO
Format: Patent
Sprache:eng
Schlagworte:
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:PURPOSE: To precisely detect the fine defect of an X-ray taking-out window. CONSTITUTION: When a fine defect 3 is present on the X-ray taking-out window of an X-ray generating chamber 1, an X-ray is emitted to the X-ray taking-out window and an X-ray transmitting structure 4 having a standard pattern 5, whereby a composite transfer image is formed on a wafer 7. The fine defect of the X-ray taking-out window is detected by this image.