VACUUM SUCTION APPARATUS

PURPOSE: To obtain a vacuum suction apparatus by which a sample can be corrected with high flatness without being influenced by dust particles or the like even at the outer circumference of the sample. CONSTITUTION: A vacuum suction part 3 and a seal part which surrounds it are formed on the surface...

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Bibliographische Detailangaben
Hauptverfasser:	TSUYUSAKI HARUO, SHIBAYAMA AKINORI, UNE ATSUNOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: To obtain a vacuum suction apparatus by which a sample can be corrected with high flatness without being influenced by dust particles or the like even at the outer circumference of the sample. CONSTITUTION: A vacuum suction part 3 and a seal part which surrounds it are formed on the surface of a vacuum suction device 1. Protruding pieces 2, 11 are formed respectively so as to be flush at the vacuum suction part 3 and the seal part, and a sample 6 is borne by the protruding pieces. A very small gap 12 formed between the seal part and the sample 6 acts as a large resistance in a vacuum evacuation operation so as to prevent the outside air from being sucked. In addition, the gap acts to prevent a working liquid from creeping in a working operation.