PROBE ANALYSIS MICROSCOPE

PURPOSE: To provide a probe analysis microscope which performs three dimensional mass spectrometry. CONSTITUTION: The lower part of an ion introduction tube 11 coupled with a part where TOF mass spectrometry is performed, a thin tube 25 is fixed and banded. In the thin tube 25, a probe 22 fixed and bonded to a piezo element 23 is housed. A moving table 17 provided an a sample state of an inverted type optical microscope has a structure where piezo elements 29, 30, 31x1 , 31x2 , etc., are fixed and banded to the side surface of a flexible cylindrical member 28. On a sample pan 26 on the cylindrical member 28, a to-be-measured sample M is placed for inserting a tip of the thin tube 25 into the to-be-measured sample M, and then voltage of various levels of specified polarity are applied to the piezo elements 23, 29, 30 31x1 , 31x2 , etc., so that the cylindrical member 28 is three-dimensionally deformed, and a position is controlled in the vertical direction of the probe 22. And, when voltage of specified polarity is applied between the probe 22 and the to-be-measured sample M, ion in the to-be- measured sample is made stuck to the probe 22, then released inside of the ion introduction tube 11, thus the mass spectrometry is three-dimensionally performed.