SEMICONDUCTOR CLEANING EQUIPMENT

PURPOSE:To make the effective use of an area of a high degree of purity like a clean room by a method wherein an object to be processed can independently be processed by each individual function in a unit of process such as alien substance removal, metal separation organic substance separation, dryn...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	IWASAKI TAKEMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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