MANUFACTURE OF MAGNETOSTRICTIVE FILM FOR TORQUE SENSOR

PURPOSE:To provide a magnetostrictive film for a torque sensor with high sensitivity and low hysterisis and a manufacturing method thereof. CONSTITUTION:A magnetostrictive film having a magnetostrictive effect is formed on the surface of an axle so that a torque sensor that detects strain torque app...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIDA KAZUFUMI, SUGIHARA TADASHI, OUCHI YUKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a magnetostrictive film for a torque sensor with high sensitivity and low hysterisis and a manufacturing method thereof. CONSTITUTION:A magnetostrictive film having a magnetostrictive effect is formed on the surface of an axle so that a torque sensor that detects strain torque applied on the axle is formed. The magnetostrictive film has a compound structure wherein a phase made of, for example, Fe-Ni group, Co-Ni group or Fe-Al group that mainly represents a magnetostrictive effect is finely dispersed into a matrix consisting of a phase made of a boride, a borosilicate or the like of the magnetostrictive alloy that mainly represents a hardness effect.