PROTECTOR AND STOCKING METHOD OF PROBE CARD FOR MEASURING SEMICONDUCTOR

PURPOSE: To protect a probe surely at the time of stocking while facilitating the work for fixing/removing a probe to/from an inspection equipment by covering the projecting side of the probe and mounting the probe detachably on a test circuit board through a probe card. CONSTITUTION: At the time of stocking a probe card, a protector 9 made of transparent acryl is fixed to the probe card on the projecting face side of probe (lower surface side). The protector 9 has a recess 9a for receiving and protecting a probe 8. The protector 9 is secured by passing two knurled screws 10 through insertion holes 11 made oppositely at the outer fringe part of the protector 9 and insertion holes 12 of the probe card 7 and then screwing the screws 10 into threaded holes 13 of a DUT board 5. Consequently, the protector 9 of probe card 7 can be mounted or removed easily by tightening or loosening the decoration screws 10 without requiring any tool, e.g. a screw driver.