MAGNETIC HEAD SLIDER FOR CONTACT RECORDING AND ITS MANUFACTURE

PURPOSE: To obtain a highly reliable magnetic head slider with a decrease in friction force by providing a carbon protecting film having fluorine ions injected onto a sliding face of the magnetic head slider. CONSTITUTION: An Si film 1b and a C film 1a as a sliding protecting film are formed respectively 5nm thick and 20nm thick by sputtering on a surface of an Al2 O3 TiC slider substrate 4 facing a disc. Thereafter, CF4 gas is subjected to ion separation thereby to inject fluorine ions into the C film 1b at a voltage of 10KV. The surface roughness is increased and the formation of a lyophobic surface is facilitated because the fluorine ions are injected into the C film 1b as the sliding protecting film, and consequently the shear strength of an interface to a lubricant on the magnetic disc is eased. The friction force is accordingly decreased. Moreover, the abrasion is reduced, so that a highly reliable slider is obtained.