METHOD FOR REFINING IMPURE AQUEOUS HYDROGEN PEROXIDE SOLUTION

PURPOSE: To refine an impure aq. hydrogen peroxide soln. and to obtain an aq. hydrogen peroxide soln. having extremely high quality, especially which can be used for the production of LSIs by allowing the impure aq. hydrogen peroxide soln. to pass through a cation exchange resin layer, a halogen-con...

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Hauptverfasser:	SUGIHARA YASUO, SHIMOKAWA SHIGEKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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