PRODUCTION OF HIGH-PURITY GASEOUS NITROGEN TRIFLUORIDE

PURPOSE: To produce high-purity gaseous nitrogen trifluoride by using ammonium hydrogen fluoride as the electrolyte and conducting molten salt electrolysis with use of a specified-purity nickel electrode. CONSTITUTION: A nickel electrode contg., by weight,

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Bibliographische Detailangaben
Hauptverfasser: HIRATA YASUNOBU, SHINOZAKI TAKEKI
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE: To produce high-purity gaseous nitrogen trifluoride by using ammonium hydrogen fluoride as the electrolyte and conducting molten salt electrolysis with use of a specified-purity nickel electrode. CONSTITUTION: A nickel electrode contg., by weight,