MOS DEVICE AND MANUFACTURE THEREOF

PURPOSE: To prevent the effect of a short channel that is a problem being generated from a MOS element where the length of a channel becomes short owing to the high integration of an integrated circuit, the increase in resistance of a source and a drain, and the decrease in the reliability of an ele...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIN JIYOKAN, KIYOU SEIGEN, KIYOU GENKIYUU, YANAGI SHIYOUZEN
Format: Patent
Sprache:eng
Schlagworte:
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