FORMATION OF COATING FILM ON CYLINDRICAL SUBSTRATE AND COATER

PURPOSE: To provide a method for forming a uniform coating film excellent in thickness precision with good productivity and to provide a coater. CONSTITUTION: A cylindrical substrate is dipped in a coating soln. with its opening turned downward and then pulled up while supplying the coating soln. or...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KONO TOSHIO, HIGASHIDE KAZUHIRO, HASEGAWA MASARU, UMEZAKI TETSUHIRO, SUDA OSAMU
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE: To provide a method for forming a uniform coating film excellent in thickness precision with good productivity and to provide a coater. CONSTITUTION: A cylindrical substrate is dipped in a coating soln. with its opening turned downward and then pulled up while supplying the coating soln. or the level of the coating soln. is lowered to form a coating film on the substrate face. The coating soln. is continuously supplied to a coating system in which the substrate is dipped through a constant gas pressure to form a coating soln. supply state. A coating tank 1 to dip the cylindrical substrate 3 into the coating soln. and an agitated tank 2 to supply the coating soln. to the coating tank 1 are connected through a pipe. The agitated tank 2 is resistant to pressure and closed, and a pipe 12 pressurized with the gas for sending the coating soln. under pressure is connected to the upper part of the tank 2.