MICROCARRIER

PURPOSE: To simplify carrying speed control securing a large carrying force using electrostatic force as a power source, by aggregating and setting electrostatic microactuators in array two-dimensionally to constitute a carrier. CONSTITUTION: In each square recession formed in a stator 5 made of an insulator constituted by arranging square elements into the shape of a lattice, an electrostatic microactuator 14 to be an element of a microcarrier is formed by assembling a carrier element 10 bridged between side walls of the stator 5 by the aid of a pair of, right and left, spring members 9, the sucking electrode 11 of the carrier element 10, and second and third sucking electrodes arranged in opposition on the side walls of the stator 10 on both, right and left, sides of the carrier element 10 interposing it. These electrostatic microactuators 14 being carrier elements are aggregated/arranged into the shape of a lattice on the same plane. And a work can be carried linearly by connecting each electrostatic microactuator 14 with the movement of the work, and performing synchronous control between lines.