SUPPORTING DEVICE FOR VACUUM EXHAUST DEVICE

PURPOSE: To minimize force which acts on a vacuum chamber irrespective of mass of a vacuum exhaust device. CONSTITUTION: A vacuum exhaust device 3 arranged below a vacuum chamber 1 is connected to the vacuum chamber 1 through a pipe 5. In a supporting device of the vacuum exhaust device 3 supported...

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Bibliographische Detailangaben
Hauptverfasser: YOKOUCHI SHIGERU, YAMANO YOSHIYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE: To minimize force which acts on a vacuum chamber irrespective of mass of a vacuum exhaust device. CONSTITUTION: A vacuum exhaust device 3 arranged below a vacuum chamber 1 is connected to the vacuum chamber 1 through a pipe 5. In a supporting device of the vacuum exhaust device 3 supported by a supporting means, the supporting means is provided with communicating pipes 7 in which fluid is filled, a piston 9 which is provided in one of the communicating pipes 7 in such a way that it can ascend and descend freely and supports the vacuum exhaust device 3 which is displaced downward when the vacuum chamber 1 and the vacuum exhaust device are expanded thermally, and a weight 14 which is provided in the other pipe of the communicating pipes 7 and is balanced with the vacuum exhaust device 3.