PROBE CARD, COAXIAL PROBE NEEDLE FOR PROBE CARD AND THEIR PRODUCTION

PURPOSE:To reduce the reflection of transfer signals issued from a tester side by electrically connecting a terminal part as a central conductor of a coaxial probe needle member with a printed board circuit and further electrically connecting a terminal part of a circumferential conductor with an earth board. CONSTITUTION:A coaxial cable 31 is bent as a U shape and a far end part of the cable 31 is inserted into a hole 22b in an earth board 22. Further, an exposed probe needle member 33 is passed through a hole 21c of an electrode pattern 21b in a printed board 21 and it is projected by an appropriate length from the board 21. Then a conductor mesh 35 is soldered to an upper-surface conductive layer 22c of the board 22. On the other hand, a far end part 33e of the member 33 is soldered to the pattern 21b. Thus, impedance matching with a tester side can be accomplished, and furthermore the electrical reflection can be reduced and dielectric noise can be suppressed as well, resulting in an excellent testing property.