THIN FILM SEMICONDUCTOR DEVICE AND LIQUID CRYSTAL DISPLAY USING IT
PURPOSE:To present a high-performance thin film semiconductor device realizing even higher resolution and to realize a liquid crystal display which can show high resolution and excellent images by using such thin film semiconductor device. CONSTITUTION:A TFT having excellent operating characteristic...
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Zusammenfassung: | PURPOSE:To present a high-performance thin film semiconductor device realizing even higher resolution and to realize a liquid crystal display which can show high resolution and excellent images by using such thin film semiconductor device. CONSTITUTION:A TFT having excellent operating characteristics such as operating threshold, drain current capacity, and mobility can be realized by forming an overlapping length of a source electrode 11 on a channel protective layer 6, which is 2.5 to 1.5% of a channel region length of a semiconductor layer 4, and forming an overlapping length Ls of the source electrode 11 on the channel protective layer 6 which is less than an overlapping length Ld of a drain electrode 8 on the channel, protective layer 6. Moreover, such overlapping lengths is and Ld on the channel protective layer 6 can be controlled by changing forming patterns of the source electrode 11 and the drain electrode 8, so that the manufacturing process is not cumbersome. |
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