SURFACE FLAW INSPECTION METHOD AND DEVICE THEREFOR
PURPOSE:To provide a surface flaw inspection method capable of inspecting a flaw on a simpler principle and capable of surely detecting a flaw even when the position of an edge section to be inspected is fluctuated and to provide a surface flaw inspection device capable of realizing this inspection...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To provide a surface flaw inspection method capable of inspecting a flaw on a simpler principle and capable of surely detecting a flaw even when the position of an edge section to be inspected is fluctuated and to provide a surface flaw inspection device capable of realizing this inspection method with a simple structure at a low cost. CONSTITUTION:Uniform light is radiated from a light source 4 to a translucent object 1 to be inspected having a line-like edge section 3 so that the light is fed to two adjacent faces 1a, 1b forming the edge section 3 to be inspected. The transmitted light or the reflected light obtained in the range along the direction perpendicular to the line direction of the edge section 3 is received by a line light receiving sensor 5, and the light reception is made in sequence along the line direction of the edge section 3. A flaw is detected by a detection processing means 7 based on the information of the intensity distribution of the transmitted light or the reflected light thus received. |
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