SPIN SCRUBBER

PURPOSE:To prevent electrostatic breakdown of insulation film by jetting atmosphere of positively charged ions to a sample, e.g. a semiconductor substrate, when ultrapure water is jetted thereto while being oscillated ultrasonically thereby removing static electricity at the time of cleaning without...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HIZUME KOJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!