FORMING METHOD OF THIN FILM AND PRODUCTION OF THIN FILM MAGNETIC HEAD USING THE SAME

PURPOSE:To obtain a good magnetic core having no breaking of films even on an uneven surface by forming a resist pattern to have a reversely tapered shape in the area except for the magnetic core part. CONSTITUTION:A Co-Ta-Zr amorphous magnetic film 7 is formed by sputtering on a substrate 11 having...

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Hauptverfasser:	RIYOUNAI HIROSHI, YANAGI TERUMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS SEMICONDUCTOR DEVICES
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