FORMING METHOD OF THIN FILM AND PRODUCTION OF THIN FILM MAGNETIC HEAD USING THE SAME

PURPOSE:To obtain a good magnetic core having no breaking of films even on an uneven surface by adding such a process to form a second resist pattern on a thin film of a first resist pattern on the substrate except for at least an edge area. CONSTITUTION:A Co-Ta-Zr amorphous magnetic film 7 is forme...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RIYOUNAI HIROSHI, YANAGI TERUMI
Format: Patent
Sprache:eng
Schlagworte:
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