LC FILTER AND FABRICATION THEREOF

PURPOSE:To obtain a thin LC filter in which the cut-off frequency can be lowered. CONSTITUTION:A conductor film is formed by sputtering on the surface of a dielectric magnetic substrate 22 and then the the conductor film is etched to form a coil 23. The coil 23 is covered, except the terminal parts...

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Bibliographische Detailangaben
Hauptverfasser: NAKAMURA ISAO, KAKIHARA YOSHINOBU, TAKOJIMA TAKEHIRO, WAGA SATOSHI, TAKITA KAZUNARI, SHINOI KIYOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To obtain a thin LC filter in which the cut-off frequency can be lowered. CONSTITUTION:A conductor film is formed by sputtering on the surface of a dielectric magnetic substrate 22 and then the the conductor film is etched to form a coil 23. The coil 23 is covered, except the terminal parts 24, 25 and the magnetic material connecting part 22a, with a dielectric film 26 and a conductor film 27 a part of which provides a terminal part 28. The conductor film 27 is covered with an interlayer insulating film 29 and a magnetic material film 30 bonded to the substrate 22 at the connecting part 22a. The terminal parts 24, 25 are connected, respectively, with the input side and the output side and the terminal part 28 is grounded in the digital circuit of the LC filter 21 in order to use the LC filter as a noise filter.