OPENING/CLOSING VALVE

PURPOSE:To accomplish a high airtightness without generation of dust and facilitate the fabrication processes. CONSTITUTION:When a drive arm 5 is moved toward an opening 6 and a seal material 4 is pressed to an opening side seat 6a so that an opening 7 is closed, a force in the direction of valve op...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANAI TAICHI, TOKUSHIMA SHINOBU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To accomplish a high airtightness without generation of dust and facilitate the fabrication processes. CONSTITUTION:When a drive arm 5 is moved toward an opening 6 and a seal material 4 is pressed to an opening side seat 6a so that an opening 7 is closed, a force in the direction of valve opening is transmitted to the front face la of a hollow resilient member 1, which causes an elastic deformation of the front face 1a, and following this deforming motion, a pressing plate 3 makes swings so that eventual angular error of the opening side seat 6a with the contacting surface of the seal material 4 is corrected. According to this constitution for correction of angular error using swings of the pressing plate 3, a high airtightness is obtained, compared with the conventional arrangement in which a pressing plate 3 is swung with ball rolling.