METHOD FOR PURIFYING HYDROGEN PEROXIDE AQUEOUS SOLUTION

PURPOSE:To remove a boron based impurity in a hydrogen peroxide aq. solution, which is difficult to completely remove by means of purification by such as ion exchange resin, up to 0.1ppb. CONSTITUTION:The hydrogen peroxide aq. solution containing

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Bibliographische Detailangaben
Hauptverfasser:	SUGIHARA YASUO, TANAKA KAZUNARI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To remove a boron based impurity in a hydrogen peroxide aq. solution, which is difficult to completely remove by means of purification by such as ion exchange resin, up to 0.1ppb. CONSTITUTION:The hydrogen peroxide aq. solution containing