PRESSURE SENSOR INTEGRATED WITH PRESSURE RECEIVING PIPE

PURPOSE:To obtain a small-sized pressure sensor excellent in the reproducibility of the characteristics of element. CONSTITUTION:The pressure sensor integrated with a pressure receiving pipe comprises a pressure receiving pipe 1 and a diaphragm 3 thereof wherein a strain sensor element is formed of...

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Hauptverfasser:	NOSAKA TOSHINORI, OGAWA SOICHI, SUZUKI YOSHIHIKO, TAKENAKA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS RESISTORS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To obtain a small-sized pressure sensor excellent in the reproducibility of the characteristics of element. CONSTITUTION:The pressure sensor integrated with a pressure receiving pipe comprises a pressure receiving pipe 1 and a diaphragm 3 thereof wherein a strain sensor element is formed of a thin chromium oxide film 7 on the surface of the diaphragm through a thin silicon oxide film 5.