MELT FEEDER FOR DEVICE FOR MULTILAYER EPITAXY

PURPOSE:To prolong the service life of the feeder by preventing the melt holder and shutter for growth being rubbed with each other and to obviate the growth melt from flowing outside by always keep the rubbing faces to be in a good state. CONSTITUTION:This melt feeder is provided with a melt holder...

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Bibliographische Detailangaben
1. Verfasser: NOMURA SHIGEHIKO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To prolong the service life of the feeder by preventing the melt holder and shutter for growth being rubbed with each other and to obviate the growth melt from flowing outside by always keep the rubbing faces to be in a good state. CONSTITUTION:This melt feeder is provided with a melt holder 9 contg. plural kinds of growth melts, a lid 6a having a shuttering function to supply the melts successively into the holder 6 of an array of substrate crystals and graphite thin sheets 11 and 12 capable of being attached and detached respectively to and from the rubbing faces.