HIGH VOLTAGE BOX FOR ION IMPLANTATION DEVICE

PURPOSE:To provide a high voltage box formed in a manner wherein work of in/out handling, maintenance inspection, etc., can be facilitated, in an equipment of constituting an ion beam generating device in the inside, even when a radius of curvature is enlarged in each ridge part and corner part. CONSTITUTION:In this high voltage box 2a, four ridge parts in its upper surface side are respectively constituted of upper covers 20 which can be vertically opened/closed with rotary shafts 22, provided in an upper surface part 24, serving as the center. Further, three ridge parts, not connecting the other equipment from the outside, of four upper parts in a lower surface side, are respectively constituted of a lower cover 30 which can be vertically opened/closed with a rotary shaft 32, provided in a lower surface part 34, serving as the center.