SUCTION HOLDING DEVICE, SEALING TOOL FOR SUCTION HOLDING DEVICE AND METHOD OF SUCTION HOLDING

PURPOSE:To perform a suction holding work of a semiconductor wafer efficiently by preventing the flowing in of work liquid between a suction holding surface and a back side of a sample, improving maintainability and suction holding the semiconductor wafer reliably. CONSTITUTION:A suction holding par...

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Bibliographische Detailangaben
Hauptverfasser:	SENDA KAZUNORI, TSUYUSAKI HARUO, KANAI MUNENORI, MORINAKA AKIRA, UNE ATSUNOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MANIPULATORS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FORFASTENING, CONNECTING, DISENGAGING OR HOLDING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To perform a suction holding work of a semiconductor wafer efficiently by preventing the flowing in of work liquid between a suction holding surface and a back side of a sample, improving maintainability and suction holding the semiconductor wafer reliably. CONSTITUTION:A suction holding part 17,that is disk shaped, is made of porous ceramic and suction holds a semiconductor wafer 15, is arranged on the upper part of a main device 1, a communication hole 3 is connected with the suction holding part 17, a flat first seal part 18a is arranged to the outer side of the suction holding part 17, a ring shaped groove 5 is arranged to the outer side of the seal part 18a, a second seal part 18b is arranged to the outer side of the ring shaped groove 5 and a communication hole 13 is connected with the ring shaped groove 5.