STAGE DEVICE

PURPOSE:To shorten the time for traveling to a target position by improving the follow-up of a movable stage to the rotation of a driving screw. CONSTITUTION:When the movable stage 2 is moved in the direction b, the change of its acceleration possibly decreases the reaction force applied in the oppo...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KISHINO HIDEAKI, SAEKI KAZUAKI, NARAKI TAKESHI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To shorten the time for traveling to a target position by improving the follow-up of a movable stage to the rotation of a driving screw. CONSTITUTION:When the movable stage 2 is moved in the direction b, the change of its acceleration possibly decreases the reaction force applied in the opposite direction b' to the direction b. This makes it possible to prevent a pre-load nut 3 from coming out of pre-load and stabilize the movement of the movable stage 2, improving the follow-up of it to the rotation of a driving screw 4.