EXPOSURE DEVICE

PURPOSE:To eliminate the need of a correction filter by forming an image conjugate to an exposed surface through an irregular illuminance correction lens system with the emitting surface of an integrator as an object point and adding distortion correction by the correction lens. CONSTITUTION:A single rod integrator 10 is provided instead of the conventional integrator, and a concave mirror 11 is provided instead of a collimator lens, then the irregular illuminance correction lens system 12 is provided instead of the correction filter. Furthermore, the rod integrator 10 is constituted of the single rod lens having a rectangular cross section. Some irregular illuminance is eliminated by correction by the image distortion of the lens system 12. Namely, the lens system 12 forms the image conjugate to the exposed surface on the exposed surface with the emitting surface as the object point, and adds the distortion correction that a peripheral part is contracted in comparison with a central part. Thus, the density of the illuminance in the peripheral part is increased in comparison with the central part, and the uniform exposed surface without the irregular illuminance is realized inside the image on the exposed surface.